MPS is suitable to analyze the Electrical & Optical properties of the material. Its advantage is the in-situ measurement of the electrical and optical properties under the various environment conditions; Vacuum, Temperature, Gas flow, Humidity, Irradiation of light.


• Photovoltaic cells and thermoelectric materials characterization
• Transistors, diodes, LED, ...  testing
• Bulk and thin film materials thermal conductivity measurements (3 ω Method)
• Phase transition materials electrical/optical characterization (metal oxides,  Memristor,…)
• Characterization of MEMS/NEMS mechanical and electro-mechanical resonators (reference clocks, mass sensors)
• Characterization of micro-coils and micro-antenna  for inductive sensors (Impedance spectroscopy of biological tissues,  In vivo RMN)
• Capacitive, resistive & resonant micro/nanosensors testing


Micro Probe Station

  • • T: -40 ℃~ +200 ℃(MPS-PT)

    • Sample stage size: 18ⅹ18 mm

    • Stage material : AlN


    • T: -40 ℃~ +170 ℃(MPS-PTH)

    • Sample stage size: 15ⅹ15 mm

    • Stage material : AlN

    • Φ3.2mm hole for light irradiation